JPH0426533U - - Google Patents
Info
- Publication number
- JPH0426533U JPH0426533U JP6812190U JP6812190U JPH0426533U JP H0426533 U JPH0426533 U JP H0426533U JP 6812190 U JP6812190 U JP 6812190U JP 6812190 U JP6812190 U JP 6812190U JP H0426533 U JPH0426533 U JP H0426533U
- Authority
- JP
- Japan
- Prior art keywords
- forks
- fork
- furnace
- manufacturing equipment
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812190U JPH0426533U (en]) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812190U JPH0426533U (en]) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426533U true JPH0426533U (en]) | 1992-03-03 |
Family
ID=31602288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6812190U Pending JPH0426533U (en]) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426533U (en]) |
-
1990
- 1990-06-27 JP JP6812190U patent/JPH0426533U/ja active Pending